TY  - RPRT
TI  - Deep Learning-Guided Surface Characterization for Autonomous Hydrogen Lithography
AU  - Mohammad Rashidi
AU  - Jeremiah Croshaw
AU  - Kieran Mastel
AU  - Marcus Tamura
AU  - Hedieh Hosseinzadeh
AU  - Robert A. Wolkow
PY  - 2019
DO  - 10.1088/2632-2153/ab6d5e
UR  - https://arxiv.org/abs/1902.08818
ID  - 1902.08818
ER  -