@misc{indiciae45fca61e2557,
  title = {Reference-free GIXRF-XRR as a methodology for independent validation of XRR on ultrathin layer stacks and a depth-dependent characterization},
  author = {Philipp Hönicke and Blanka Detlefs and Yves Kayser and Uwe Mühle and Beatrix Pollakowski and Burkhard Beckhoff},
  year = {2019},
  doi = {10.1116/1.5094891},
  url = {https://arxiv.org/abs/1903.01196},
  note = {Source identifier: 1903.01196}
}