TY  - RPRT
TI  - Reference-free GIXRF-XRR as a methodology for independent validation of XRR on ultrathin layer stacks and a depth-dependent characterization
AU  - Philipp Hönicke
AU  - Blanka Detlefs
AU  - Yves Kayser
AU  - Uwe Mühle
AU  - Beatrix Pollakowski
AU  - Burkhard Beckhoff
PY  - 2019
DO  - 10.1116/1.5094891
UR  - https://arxiv.org/abs/1903.01196
ID  - 1903.01196
ER  -