@misc{indiciae6db97bd44e15,
  title = {Particle dynamics in deposition of porous films with a pulsed radio-frequency atmospheric pressure glow discharge},
  author = {Y. Xu and S. A. Khrapak and K. Ding and M. Schwabe and J. -J. Shi and J. Zhang and C. -R. Du},
  year = {2019},
  url = {https://arxiv.org/abs/1903.09379},
  note = {Source identifier: 1903.09379}
}