@misc{indiciae200ad6fe5d3c,
  title = {Patterning of diamond with 10 nm resolution by electron-beam-induced etching},
  author = {Vasilis Dergianlis and Martin Geller and Dennis Oing and Nicolas Woehrl and Axel Lorke},
  year = {2019},
  doi = {10.1088/1361-6528/ab25fe},
  url = {https://arxiv.org/abs/1903.10824},
  note = {Source identifier: 1903.10824}
}