TY  - RPRT
TI  - Patterning of diamond with 10 nm resolution by electron-beam-induced etching
AU  - Vasilis Dergianlis
AU  - Martin Geller
AU  - Dennis Oing
AU  - Nicolas Woehrl
AU  - Axel Lorke
PY  - 2019
DO  - 10.1088/1361-6528/ab25fe
UR  - https://arxiv.org/abs/1903.10824
ID  - 1903.10824
ER  -