@misc{indiciaef54ddaa50b33,
  title = {Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask},
  author = {D. Virganavičius and V. J. Cadarso and R. Kirchner and L. Stankevičius and T. Tamulevičius and S. Tamulevičius and H. Schift},
  year = {2019},
  doi = {10.1016/j.apsusc.2016.05.100},
  url = {https://arxiv.org/abs/1904.01880},
  note = {Source identifier: 1904.01880}
}