TY  - RPRT
TI  - Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask
AU  - D. Virganavičius
AU  - V. J. Cadarso
AU  - R. Kirchner
AU  - L. Stankevičius
AU  - T. Tamulevičius
AU  - S. Tamulevičius
AU  - H. Schift
PY  - 2019
DO  - 10.1016/j.apsusc.2016.05.100
UR  - https://arxiv.org/abs/1904.01880
ID  - 1904.01880
ER  -