@misc{indiciaed39b47a30148,
  title = {Influence of vacuum annealing on interface properties of SiC (0001) MOS structures},
  author = {Koji Ito and Takuma Kobayashi and Tsunenobu Kimoto},
  year = {2019},
  doi = {10.7567/1347-4065/ab2557},
  url = {https://arxiv.org/abs/1904.05006},
  note = {Source identifier: 1904.05006}
}