TY  - RPRT
TI  - Influence of vacuum annealing on interface properties of SiC (0001) MOS structures
AU  - Koji Ito
AU  - Takuma Kobayashi
AU  - Tsunenobu Kimoto
PY  - 2019
DO  - 10.7567/1347-4065/ab2557
UR  - https://arxiv.org/abs/1904.05006
ID  - 1904.05006
ER  -