TY - RPRT TI - Highly efficient isotope separation and ion implantation of $^{163}$Ho for the ECHo project AU - Tom Kieck AU - Holger Dorrer AU - Christoph E. Düllmann AU - Vadim Gadelshin AU - Fabian Schneider AU - Klaus Wendt PY - 2019 DO - 10.1016/j.nima.2019.162602 UR - https://arxiv.org/abs/1904.05559 ID - 1904.05559 ER -