@misc{indiciaea09a12821a28,
  title = {Atomically Engineered Hf0.5Zr0.5O2 Integrated Nano-Electromechanical Transducers},
  author = {Mayur Ghatge and Glen Walters and Toshikazu Nishida and Roozbeh Tabrizian},
  year = {2019},
  doi = {10.1038/s41928-019-0305-3},
  url = {https://arxiv.org/abs/1904.05648},
  note = {Source identifier: 1904.05648}
}