TY  - RPRT
TI  - Atomically Engineered Hf0.5Zr0.5O2 Integrated Nano-Electromechanical Transducers
AU  - Mayur Ghatge
AU  - Glen Walters
AU  - Toshikazu Nishida
AU  - Roozbeh Tabrizian
PY  - 2019
DO  - 10.1038/s41928-019-0305-3
UR  - https://arxiv.org/abs/1904.05648
ID  - 1904.05648
ER  -