@misc{indiciaec14b305a5787,
  title = {Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning},
  author = {Anahid Jalali and Clemens Heistracher and Alexander Schindler and Bernhard Haslhofer and Tanja Nemeth and Robert Glawar and Wilfried Sihn and Peter De Boer},
  year = {2019},
  url = {https://arxiv.org/abs/1904.07686},
  note = {Source identifier: 1904.07686}
}