TY - RPRT TI - The role of ionization fraction on the surface roughness, density and interface mixing of the films deposited by thermal evaporation, dc magnetron sputtering and HiPIMS: An atomistic simulation AU - Movaffaq Kateb AU - Hamidreza Hajihoseini AU - Jon Tomas Gudmundsson AU - Snorri Ingvarsson PY - 2019 UR - https://arxiv.org/abs/1904.08758 ID - 1904.08758 ER -