@misc{indiciae6e537ff355d4,
  title = {Demonstration of Sputtering Atomic Layer Augmented Deposition (SALAD): Aluminum Oxide-Copper Dielectric-Metal Nanocomposite},
  author = {Brian Giraldo and David M. Fryauf and Brandon Cheney and Nobuhiko P. Kobayashi},
  year = {2019},
  doi = {10.1021/acsami.9b18628},
  url = {https://arxiv.org/abs/1905.00584},
  note = {Source identifier: 1905.00584}
}