TY  - RPRT
TI  - Demonstration of Sputtering Atomic Layer Augmented Deposition (SALAD): Aluminum Oxide-Copper Dielectric-Metal Nanocomposite
AU  - Brian Giraldo
AU  - David M. Fryauf
AU  - Brandon Cheney
AU  - Nobuhiko P. Kobayashi
PY  - 2019
DO  - 10.1021/acsami.9b18628
UR  - https://arxiv.org/abs/1905.00584
ID  - 1905.00584
ER  -