@misc{indiciae78bf00c33c53,
  title = {Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering},
  author = {Sharafat Ali and Biplab Paul and Roger Magnusson and Erik Ekstrom and Camille Pallier and Bo Jonson and Per Eklund and Jens Birch},
  year = {2019},
  url = {https://arxiv.org/abs/1905.02420},
  note = {Source identifier: 1905.02420}
}