TY  - RPRT
TI  - Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering
AU  - Sharafat Ali
AU  - Biplab Paul
AU  - Roger Magnusson
AU  - Erik Ekstrom
AU  - Camille Pallier
AU  - Bo Jonson
AU  - Per Eklund
AU  - Jens Birch
PY  - 2019
UR  - https://arxiv.org/abs/1905.02420
ID  - 1905.02420
ER  -