@misc{indiciae72015d103b9c,
  title = {Real-time monitoring of stress evolution during thin film growth by in situ substrate curvature measurement},
  author = {Elisa Gilardi and Aline Fluri and Thomas Lippert and Daniele Pergolesi},
  year = {2019},
  doi = {10.1063/1.5054092},
  url = {https://arxiv.org/abs/1905.05060},
  note = {Source identifier: 1905.05060}
}