TY  - RPRT
TI  - Real-time monitoring of stress evolution during thin film growth by in situ substrate curvature measurement
AU  - Elisa Gilardi
AU  - Aline Fluri
AU  - Thomas Lippert
AU  - Daniele Pergolesi
PY  - 2019
DO  - 10.1063/1.5054092
UR  - https://arxiv.org/abs/1905.05060
ID  - 1905.05060
ER  -