@misc{indiciae51db46f5bf0d,
  title = {Electronic Structure Shift of Deep Nanoscale Silicon by SiO\$\_2\$- vs. Si\$\_3\$N\$\_4\$-Embedding as Alternative to Impurity Doping},
  author = {Dirk König and Noël Wilck and Daniel Hiller and Birger Berghoff and Alexander Meledin and Giovanni Di Santo and Luca Petaccia and Joachim Mayer and Sean Smith and Joachim Knoch},
  year = {2019},
  doi = {10.1103/physrevapplied.12.054050},
  url = {https://arxiv.org/abs/1905.06090},
  note = {Source identifier: 1905.06090}
}