TY  - RPRT
TI  - Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators
AU  - Pedram Sadeghi
AU  - Manuel Tanzer
AU  - Simon L. Christensen
AU  - Silvan Schmid
PY  - 2019
DO  - 10.1063/1.5111712
UR  - https://arxiv.org/abs/1905.06730
ID  - 1905.06730
ER  -