@misc{indiciae3bb5545ac983,
  title = {Application of support vector machine for the fast and accurate reconstruction of nanostructures in optical scatterometry},
  author = {Jinlong Zhu and Hao Jiang and Chuanwei Zhang and Xiuguo Chen and Shiyuan Liu},
  year = {2019},
  url = {https://arxiv.org/abs/1905.06857},
  note = {Source identifier: 1905.06857}
}