TY  - RPRT
TI  - Application of support vector machine for the fast and accurate reconstruction of nanostructures in optical scatterometry
AU  - Jinlong Zhu
AU  - Hao Jiang
AU  - Chuanwei Zhang
AU  - Xiuguo Chen
AU  - Shiyuan Liu
PY  - 2019
UR  - https://arxiv.org/abs/1905.06857
ID  - 1905.06857
ER  -