@misc{indiciae23eb31bab3c6, title = {Enhanced thermal sensitivity of MEMS bolometers integrated with two-dimensional phononic crystals}, author = {Ya Zhang and Boqi Qiu and Naomi Nagai and Masahiro Nomura and Sebastian Volz and Kazuhiko Hirakawa}, year = {2019}, doi = {10.1063/1.5113521}, url = {https://arxiv.org/abs/1905.08918}, note = {Source identifier: 1905.08918} }