TY  - RPRT
TI  - Enhanced thermal sensitivity of MEMS bolometers integrated with two-dimensional phononic crystals
AU  - Ya Zhang
AU  - Boqi Qiu
AU  - Naomi Nagai
AU  - Masahiro Nomura
AU  - Sebastian Volz
AU  - Kazuhiko Hirakawa
PY  - 2019
DO  - 10.1063/1.5113521
UR  - https://arxiv.org/abs/1905.08918
ID  - 1905.08918
ER  -