TY  - RPRT
TI  - On the role of secondary electron emission in capacitively coupled radio frequency plasma sheath: a theoretical ground
AU  - Guang-Yu Sun
AU  - Han-Wei Li
AU  - An-Bang Sun
AU  - Yuan Li
AU  - Bai-Peng Song
AU  - Hai-Bao Mu
AU  - Xiao-Ran Li
AU  - Guan-Jun Zhang
PY  - 2019
DO  - 10.1002/ppap.201900093
UR  - https://arxiv.org/abs/1905.11688
ID  - 1905.11688
ER  -