@misc{indiciaedf26a1105caf,
  title = {Nanowire single-photon detectors made of atomic layer-deposited niobium nitride},
  author = {Emanuel Knehr and Artem Kuzmin and Mario Ziegler and Steffen Doerner and Konstantin Ilin and Michael Siegel and Ronny Stolz and Heidemarie Schmidt},
  year = {2019},
  doi = {10.1088/1361-6668/ab48d7},
  url = {https://arxiv.org/abs/1906.05214},
  note = {Source identifier: 1906.05214}
}