@misc{indiciae7b3b06b9d25f,
  title = {An atomic force microscopy and optical microscopy study of various shaped void formation and reduction in 3C-SiC films grown on Si using chemical vapor deposition},
  author = {A. Gupta and J. Sengupta and C. Jacob},
  year = {2019},
  doi = {10.1016/j.tsf.2007.05.007},
  url = {https://arxiv.org/abs/1906.05357},
  note = {Source identifier: 1906.05357}
}