TY  - RPRT
TI  - An atomic force microscopy and optical microscopy study of various shaped void formation and reduction in 3C-SiC films grown on Si using chemical vapor deposition
AU  - A. Gupta
AU  - J. Sengupta
AU  - C. Jacob
PY  - 2019
DO  - 10.1016/j.tsf.2007.05.007
UR  - https://arxiv.org/abs/1906.05357
ID  - 1906.05357
ER  -