@misc{indiciaed28ad400defd,
  title = {Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions},
  author = {Dmitry Kalanov and André Anders and Carsten Bundesmann},
  year = {2019},
  url = {https://arxiv.org/abs/1906.05550},
  note = {Source identifier: 1906.05550}
}