@misc{indiciae949af4d939af,
  title = {XeF\$\_2\$-Enhanced Focused Ion Beam Etching and Passivation of GaSb},
  author = {Pierce Maguire and Darragh Keane and Brian Kelly and Colm C. Faulkner and Hongzhou Zhang},
  year = {2019},
  url = {https://arxiv.org/abs/1906.05882},
  note = {Source identifier: 1906.05882}
}