TY  - RPRT
TI  - XeF$_2$-Enhanced Focused Ion Beam Etching and Passivation of GaSb
AU  - Pierce Maguire
AU  - Darragh Keane
AU  - Brian Kelly
AU  - Colm C. Faulkner
AU  - Hongzhou Zhang
PY  - 2019
UR  - https://arxiv.org/abs/1906.05882
ID  - 1906.05882
ER  -