@misc{indiciae3ae68270cb02,
  title = {Squeeze film pressure sensors based on SiN membrane sandwiches},
  author = {Sepideh Naserbakht and Aurélien Dantan},
  year = {2019},
  doi = {10.1016/j.sna.2019.111588},
  url = {https://arxiv.org/abs/1906.07980},
  note = {Source identifier: 1906.07980}
}