TY  - RPRT
TI  - Squeeze film pressure sensors based on SiN membrane sandwiches
AU  - Sepideh Naserbakht
AU  - Aurélien Dantan
PY  - 2019
DO  - 10.1016/j.sna.2019.111588
UR  - https://arxiv.org/abs/1906.07980
ID  - 1906.07980
ER  -