TY - RPRT TI - Direct micro-structuring of Si(111) surfaces through nanosecond-laser Bessel beams AU - Erkan Demirci AU - Elif Turkan Aksit Kaya AU - Ramazan Sahin PY - 2019 DO - 10.1007/s00339-020-03608-0 UR - https://arxiv.org/abs/1906.09193 ID - 1906.09193 ER -