@misc{indiciaea6a2cd2ae55d,
  title = {Morphology modifcation of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm},
  author = {Xiaomo Xu and Karl-Heinz Heinig and Wolfhard Möller and Hans-Jürgen Engelmann and Nico Klingner and Ahmed Gharbi and Raluca Tiron and Johannes von Borany and Gregor Hlawacek},
  year = {2019},
  doi = {10.1088/1361-6641/ab57ba},
  url = {https://arxiv.org/abs/1906.09975},
  note = {Source identifier: 1906.09975}
}