TY  - RPRT
TI  - Morphology modifcation of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm
AU  - Xiaomo Xu
AU  - Karl-Heinz Heinig
AU  - Wolfhard Möller
AU  - Hans-Jürgen Engelmann
AU  - Nico Klingner
AU  - Ahmed Gharbi
AU  - Raluca Tiron
AU  - Johannes von Borany
AU  - Gregor Hlawacek
PY  - 2019
DO  - 10.1088/1361-6641/ab57ba
UR  - https://arxiv.org/abs/1906.09975
ID  - 1906.09975
ER  -