@misc{indiciaed1a5abc29281,
  title = {First demonstration of 200, 100, and 50 um pitch Resistive AC-Coupled Silicon Detectors (RSD) with 100\% fill-factor for 4D particle tracking},
  author = {M. Mandurrino and R. Arcidiacono and M. Boscardin and N. Cartiglia and G. F. Dalla Betta and M. Ferrero and F. Ficorella and L. Pancheri and G. Paternoster and F. Siviero and M. Tornago},
  year = {2019},
  doi = {10.1109/led.2019.2943242},
  url = {https://arxiv.org/abs/1907.03314},
  note = {Source identifier: 1907.03314}
}