@misc{indiciae0d69d8babecd, title = {Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor}, author = {Rugved Likhite and Aishwaryadev Banerjee and Apratim Majumder and Hanseup Kim and and Carlos H. Mastrangelo}, year = {2019}, doi = {10.3390/s19183954}, url = {https://arxiv.org/abs/1907.03898}, note = {Source identifier: 1907.03898} }