TY - RPRT TI - Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor AU - Rugved Likhite AU - Aishwaryadev Banerjee AU - Apratim Majumder AU - Hanseup Kim and AU - Carlos H. Mastrangelo PY - 2019 DO - 10.3390/s19183954 UR - https://arxiv.org/abs/1907.03898 ID - 1907.03898 ER -