@misc{indiciaebbc9cf9a8c51,
  title = {Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings},
  author = {Analía Fernández Herrero and Mika Pflüger and Jürgen Probst and Frank Scholze and Victor Soltwisch},
  year = {2019},
  doi = {10.1364/oe.27.032490},
  url = {https://arxiv.org/abs/1907.05307},
  note = {Source identifier: 1907.05307}
}