TY  - RPRT
TI  - Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings
AU  - Analía Fernández Herrero
AU  - Mika Pflüger
AU  - Jürgen Probst
AU  - Frank Scholze
AU  - Victor Soltwisch
PY  - 2019
DO  - 10.1364/oe.27.032490
UR  - https://arxiv.org/abs/1907.05307
ID  - 1907.05307
ER  -