@misc{indiciaea6b2e47039ff,
  title = {Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins},
  author = {Mehrdad Ramezani and Valeriy Felmetsger and Nicholas Rudawski and Roozbeh Tabrizian},
  year = {2020},
  url = {https://arxiv.org/abs/1907.05456},
  note = {Source identifier: 1907.05456}
}