TY  - RPRT
TI  - Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins
AU  - Mehrdad Ramezani
AU  - Valeriy Felmetsger
AU  - Nicholas Rudawski
AU  - Roozbeh Tabrizian
PY  - 2020
UR  - https://arxiv.org/abs/1907.05456
ID  - 1907.05456
ER  -