@misc{indiciaefe2a6bab7351,
  title = {Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique},
  author = {Viveksharma Prabhakara and Daen Jannis and Armand Béché and Hugo Bender and Johan Verbeeck},
  year = {2019},
  doi = {10.1088/1361-6641/ab5da2},
  url = {https://arxiv.org/abs/1907.11661},
  note = {Source identifier: 1907.11661}
}