TY  - RPRT
TI  - Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique
AU  - Viveksharma Prabhakara
AU  - Daen Jannis
AU  - Armand Béché
AU  - Hugo Bender
AU  - Johan Verbeeck
PY  - 2019
DO  - 10.1088/1361-6641/ab5da2
UR  - https://arxiv.org/abs/1907.11661
ID  - 1907.11661
ER  -