@misc{indiciae10f38fd52ea6,
  title = {Silicon Hard-Stop Spacers for 3D Integration of Superconducting Qubits},
  author = {Bethany M. Niedzielski and David K. Kim and Mollie E. Schwartz and Danna Rosenberg and Greg Calusine and Rabi Das and Alexander J. Melville and Jason Plant and Livia Racz and Jonilyn L. Yoder and Donna Ruth-Yost and William D. Oliver},
  year = {2019},
  url = {https://arxiv.org/abs/1907.12882},
  note = {Source identifier: 1907.12882}
}