@misc{indiciaeb4480535e20a, title = {Sub-surface modifications in silicon with ultrashort pulsed lasers above 2 microns}, author = {Roland A. Richter and Nikolai Tolstik and Sebastien Rigaud and Paul Dalla Valle and Andreas Erbe and Petra Ebbinghaus and Ignas Astrauskas and Vladimir Kalashnikov and Evgeni Sorokin and Irina T. Sorokina}, year = {2020}, doi = {10.1364/josab.396074}, url = {https://arxiv.org/abs/1907.13186}, note = {Source identifier: 1907.13186} }